HP90 Digital Programmable Wafer Bake Plate 數位可程式晶圓烤盤

Brand: TPS / USA

Large circular milled-flat aluminum surface with temperature uniformity better than 1% across the heating surface. Designed specifically for working with 12” (304.8mm) diameter or smaller silicon wafers and other samples where temperature accuracy and surface uniformity are a must.

Description
The Torrey Pines Scientific WaferPlate™ Programmable Bake Plate is a fully programmable digital hot plate designed specifically for baking silicon wafers. In manual operation simply set a target temperature and the unit will go to and hold that exact temperature to within ± 1 °C. In the programmable mode routines can be stored in memory for instant recall and use. The stored routine will be run automatically, and exactly the same, again and again.

Programs can be simple or complex depending upon need. Multiple temperatures, temperature ramp rates if wanted, and dwell times can be stored. These programs can be written and stored in the remote controller provided with the unit, or the programs can be as simple or complex as needed when written by the user on a PC and run by that PC via the RS-232 I/O port on the rear of the heater.

Features
13.875 in (354.24 mm) diameter heater surface
Milled flat plate aluminum ideal for 12 in (304.8 mm) or smaller silicon wafers
Controllable remotely from a PC or industrial controller via RS232 I/O port or via the Remote Controller Provided with full access to all parameters or data
Bench top controllable and programmable using the remote controller provided
Temperature range from room temperature to 350 °C
Readable and settable to 1 °C
Accuracy 1% of setting
Uniformity of temperature from the middle of the plate surface to within 0.75 in of the sides is better than 1%
Temperature stability ± 1 °C
Calibrated to 0.1 °C for guaranteed accuracy
Remote controller enables storing 5 individual programs with up to 10 steps per program for a variety of hands-off, repeatable sample runs
Programs automatically repeatable from 1 to 99 times or infinitely if wanted
Ramp temperatures up or down at 1 °C/hour increments from 1 °C to 450 °C
1500 W heater power
Unique temperature indicator lighting ring at the bottom sides of chassis. Colors change from blue (no target temperature) to yellow (when heating below 50 °C) to red (when heating above 50 °C). The lights will flash until the temperature is stable within ± 0.2 °C
Built-in count down timer with audible alarm and settable Auto-Off
12-month warranty
UL, CSA and CE approvals pending

Applications
Cleaning silicon wafers
Drying silicon wafers
Etching silicon wafers
Heat testing circuits
Heat testing epoxies
Soldering surface mount PCB’s
Life cycle testing of PCB’s
Testing LCD’s

Full Product Specifications
Temperature
Platinum RTD 100 Ω at zero mounted in the heater top
Range 10 °C to 350 °C on the plate surface
Readability 1 °C

Temperature control type PID

Temperature stability 1 °C

Temperature Uniformity Better than 1% of setting from center to within 0.75” of plate edge
Electrical

Heater power 1500 W
VAC 115 VAC, 50/60 Hz (230 VAC available upon request)

Fused Yes

Line Cord Detachable, 6 ft (1.8 m), 3-wire grounded. Single phase

Dimensions: Heater Module
Width 13.875 in (352.4 mm) circle
Height 5.75 in (146 mm)
Weight 21.5 lb (9.54 kg)

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